Micro electro mechanical system design

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Bibliographic Details
Main Author:	Allen, James J
Format:	Book
Published:	Boca Raton Taylor & Francis 2005
Series:	Mechanical engineering 192
Subjects:	Microelectromechanical systems > Design and construction Engineering design
Online Access:	Click Here to View Status and Holdings.
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001	wils-336856
020	#	#	\|a 0824758242 (alk. paper)
090	0	0	\|a TK153 \|b .A47 2005
100	1	#	\|a Allen, James J
245	1	1	\|a Micro electro mechanical system design \|c James J. Allen
260	#	#	\|a Boca Raton \|b Taylor & Francis \|c 2005
300	#	#	\|a 465 p. \|b ill. \|c 23 cm
490	1	#	\|a Mechanical engineering \|v 192
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microelectromechanical systems \|x Design and construction
650	#	0	\|a Engineering design
840	#	#	\|a Mechanical engineering (Taylor & Francis) ; \|v 192
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=336856
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam