Micro electro mechanical system design

Micro electro mechanical system design

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Bibliographic Details
Main Author: Allen, James J
Format: Unknown
Published: Boca Raton Taylor & Francis 2005
Series:Mechanical engineering 192
Subjects:
Microelectromechanical systems > Design and construction
Engineering design
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:465 p. ill. 23 cm
Bibliography:Includes bibliographical references and index
ISBN:0824758242 (alk. paper)

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