Introduction to microelectromechanical systems engineering
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| Format: | Unknown |
| Published: |
Boston
Artech House
2004
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| Edition: | 2nd ed |
| Series: | Microelectromechanical systems series
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Principles of microelectromechanical systems
A guide to hands-on MEMS design and prototyping
