Introduction to microelectromechanical systems engineering

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Bibliographic Details
Main Author:	Maluf, Nadim
Other Authors:	Williams, Kirt
Format:	Unknown
Published:	Boston Artech House 2004
Edition:	2nd ed
Series:	Microelectromechanical systems series
Subjects:	Microelectromechanical systems
Online Access:	Click Here to View Status and Holdings.
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