Introduction to microelectromechanical systems engineering

Saved in:

Bibliographic Details
Main Author:	Maluf, Nadim
Other Authors:	Williams, Kirt
Format:	Unknown
Published:	Boston Artech House 2004
Edition:	2nd ed
Series:	Microelectromechanical systems series
Subjects:	Microelectromechanical systems
Online Access:	Click Here to View Status and Holdings.
Tags:	Add Tag No Tags, Be the first to tag this record!

MARC


LEADER	00000n a2200000 a 4501
001	wils-332555
020	#	#	\|a 1580535909
020	#	#	\|a 9781580535908
040	#	#	\|a DLC \|d ITMB
090	0	0	\|a TK7875 \|b .M35 2004
100	1	#	\|a Maluf, Nadim
245	1	0	\|a Introduction to microelectromechanical systems engineering \|c Nadim Maluf, Kirt Williams
250	#	#	\|a 2nd ed
260	#	#	\|a Boston \|b Artech House \|c 2004
300	#	#	\|a xx, 283 p. \|b ill. \|c 26 cm
490	1	#	\|a Microelectromechanical systems series
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microelectromechanical systems
700	1	#	\|a Williams, Kirt
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=332555
964	#	#	\|c BOK \|d 01
998	#	#	\|a 00250##a002.5.2\|\|00260##a002.8.2\|\|00260##b002.8.4\|\|00260##c002.7.6\|\|00300##a003.4.1\|\|00300##b003.6.1\|\|00300##c003.5.1\|\|