Introduction to microelectromechanical systems engineering
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Unknown |
| Published: |
Boston
Artech House
2004
|
| Edition: | 2nd ed |
| Series: | Microelectromechanical systems series
|
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Add Tag | Physical Description: | xx, 283 p. ill. 26 cm |
|---|---|
| Bibliography: | Includes bibliographical references and index |
| ISBN: | 1580535909 9781580535908 |
Principles of microelectromechanical systems