Foundations of MEMS

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Bibliographic Details
Main Author:	Liu, Chang
Format:	Book
Published:	Upper Saddle River, NJ Pearson Prentice Hall 2005
Subjects:	Microelectromechanical systems
Online Access:	Click Here to View Status and Holdings.
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245	1	1	\|a Foundations of MEMS \|c Chang Liu
260	#	#	\|a Upper Saddle River, NJ \|b Pearson Prentice Hall \|c 2005
300	#	#	\|a p. cm
500	#	#	\|a Includes index
650	#	0	\|a Microelectromechanical systems
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