Nano- and micro-electromechanical systems fundamentals of nano- and microengineering
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| Main Author: | |
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| Format: | Unknown |
| Published: |
Boca Raton, Fla.
CRC Press
2005
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| Edition: | 2nd ed |
| Series: | Nano- and microscience, engineering, technology, and medicine series
8 |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | 722 p. ill. 26 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9780849328381 0849328381 |
Nano-and microelectromechanical systems fundamentals of nano-and microengineering