Micro-optomechatronics
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| Format: | Unknown |
| Published: |
New York
Marcel Dekker
2005
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| Series: | Optical engineering
v. 92 |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | viii, 306 p. ill. 24 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0824759834 (alk. paper) |
Nano- and micro-electromechanical systems fundamentals of nano- and microengineering