Chemical vapor deposition thermal and plasma deposition of electronic materials

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Bibliographic Details
Main Author:	Sivaram, S
Format:	Book
Published:	New York Van Nostrand Reinhold 1995
Subjects:	Chemical vapor deposition Microelectronics > Materials Microelectronics industry
Online Access:	Click Here to View Status and Holdings.
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020	#	#	\|a 0442010796
090	0	0	\|a TK7836.S54 1995
100	1	#	\|a Sivaram, S
245	1	1	\|a Chemical vapor deposition \|b thermal and plasma deposition of electronic materials
260	#	#	\|a New York \|b Van Nostrand Reinhold \|c 1995
300	#	#	\|a xii, 292 \|b ill. \|c 24 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Chemical vapor deposition
650	#	0	\|a Microelectronics \|x Materials
650	#	0	\|a Microelectronics industry
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=328985
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam