Chemical vapor deposition thermal and plasma deposition of electronic materials

Chemical vapor deposition thermal and plasma deposition of electronic materials

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Bibliographic Details
Main Author: Sivaram, S
Format: Book
Published: New York Van Nostrand Reinhold 1995
Subjects:
Chemical vapor deposition
Microelectronics > Materials
Microelectronics industry
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xii, 292 ill. 24 cm
Bibliography:Includes bibliographical references and index
ISBN:0442010796

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