Ion implantation
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| Other Authors: | |
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| Format: | Book |
| Published: |
Amsterdam New York
North-Holland Pub. Co. American Elsevier
1973
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| Series: | Defects in crystalline solids
v. 8 |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xv, 802 p. with illus. 23 cm |
|---|---|
| Bibliography: | Includes bibliographies. |
| ISBN: | 0444104887 |
Trends in ion implantation