CMOS cantilever sensor systems atomic force microscopy and gas sensing applications

CMOS cantilever sensor systems atomic force microscopy and gas sensing applications

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Bibliographic Details
Main Author:	Lange, D 1970- ( Dirk)
Other Authors:	Brand, Oliver 1964-, Baltes, H. (Henry)
Format:	Book
Published:	Berlin New York Springer 2002
Series:	Microtechnology and MEMS
Subjects:	Levers > Design and construction Atomic force microscopy > Equipment and supplies > Design and construction Gas detectors > Design and construction Microelectromechanical systems > Design and construction Metal oxide semiconductors, Complementary > Design and construction
Online Access:	Click Here to View Status and Holdings.
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