CMOS cantilever sensor systems atomic force microscopy and gas sensing applications

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Bibliographic Details
Main Author:	Lange, D 1970- ( Dirk)
Other Authors:	Brand, Oliver 1964-, Baltes, H. (Henry)
Format:	Book
Published:	Berlin New York Springer 2002
Series:	Microtechnology and MEMS
Subjects:	Levers > Design and construction Atomic force microscopy > Equipment and supplies > Design and construction Gas detectors > Design and construction Microelectromechanical systems > Design and construction Metal oxide semiconductors, Complementary > Design and construction
Online Access:	Click Here to View Status and Holdings.
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020	#	#	\|a 3540431438 (alk. paper)
090	0	0	\|a TK7875 \|b .L36 2002
100	1	#	\|a Lange, D \|c 1970- \|q ( Dirk)
245	1	1	\|a CMOS cantilever sensor systems \|b atomic force microscopy and gas sensing applications \|c D. Lange, O. Brand, H. Baltes
260	#	#	\|a Berlin \|a New York \|b Springer \|c 2002
300	#	#	\|a viii, 142 p. \|b ill. \|c 25 cm
490	1	#	\|a Microtechnology and MEMS
504	#	#	\|a Includes bibliographical references (p. [131]-140) and index
650	#	0	\|a Levers \|x Design and construction
650	#	0	\|a Atomic force microscopy \|x Equipment and supplies \|x Design and construction
650	#	0	\|a Gas detectors \|x Design and construction
650	#	0	\|a Microelectromechanical systems \|x Design and construction
650	#	0	\|a Metal oxide semiconductors, Complementary \|x Design and construction
700	1	#	\|a Brand, Oliver \|c 1964-
700	#	#	\|a Baltes, H. \|q (Henry)
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=316145
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