CMOS cantilever sensor systems atomic force microscopy and gas sensing applications

CMOS cantilever sensor systems atomic force microscopy and gas sensing applications

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Bibliographic Details
Main Author: Lange, D 1970- ( Dirk)
Other Authors: Brand, Oliver 1964-, Baltes, H. (Henry)
Format: Book
Published: Berlin New York Springer 2002
Series:Microtechnology and MEMS
Subjects:
Levers > Design and construction
Atomic force microscopy > Equipment and supplies > Design and construction
Gas detectors > Design and construction
Microelectromechanical systems > Design and construction
Metal oxide semiconductors, Complementary > Design and construction
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:viii, 142 p. ill. 25 cm
Bibliography:Includes bibliographical references (p. [131]-140) and index
ISBN:3540431438 (alk. paper)

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