Low dielectric constant materials for IC applications
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Other Authors: | Ho, P. S, Leu, J. 1958- (Jihperng), Lee, Wei William |
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Format: | Book |
Published: |
Berlin New York
Springer
2003
|
Series: | Springer series in advanced microelectronics,
9 |
Subjects: | |
Online Access: | Click Here to View Status and Holdings. |
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