Low dielectric constant materials for IC applications

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Bibliographic Details
Other Authors:	Ho, P. S, Leu, J. 1958- (Jihperng), Lee, Wei William
Format:	Book
Published:	Berlin New York Springer 2003
Series:	Springer series in advanced microelectronics, 9
Subjects:	Dielectrics Integrated circuits Electric insulators and insulation
Online Access:	Click Here to View Status and Holdings.
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