Low dielectric constant materials for IC applications

Saved in:

Bibliographic Details
Other Authors:	Ho, P. S, Leu, J. 1958- (Jihperng), Lee, Wei William
Format:	Book
Published:	Berlin New York Springer 2003
Series:	Springer series in advanced microelectronics, 9
Subjects:	Dielectrics Integrated circuits Electric insulators and insulation
Online Access:	Click Here to View Status and Holdings.
Tags:	Add Tag No Tags, Be the first to tag this record!

MARC


LEADER	00000n a2200000 a 4501
001	wils-316136
020	#	#	\|a 3540678190 (alk. paper)
090	0	0	\|a TK3401 \|b .L69 2003
245	0	0	\|a Low dielectric constant materials for IC applications \|c P.S. Ho, J. Leu, W.W. Lee (eds.)
260	#	#	\|a Berlin \|a New York \|b Springer \|c 2003
300	#	#	\|a xix, 309 p. \|b ill. \|c 24 cm
490	1	#	\|a Springer series in advanced microelectronics, \|v 9 \|x 1437-0387 ;
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Dielectrics
650	#	0	\|a Integrated circuits
650	#	0	\|a Electric insulators and insulation
700	1	#	\|a Ho, P. S
700	#	#	\|a Leu, J. \|c 1958- \|q (Jihperng)
700	#	#	\|a Lee, Wei William
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=316136
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
998	#	#	\|a 00260##a002.8.2\|\|00260##a002.8.2\|\|00260##b002.8.4\|\|00260##c002.7.6\|\|00300##a003.4.1\|\|00300##b003.6.1\|\|00300##c003.5.1\|\|01700##a0011.2.2\|\|01700##c0017.8\|\|01700##q0017.8\|\|02700##a0011.2.2\|\|