Low dielectric constant materials for IC applications

Low dielectric constant materials for IC applications

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Bibliographic Details
Other Authors: Ho, P. S, Leu, J. 1958- (Jihperng), Lee, Wei William
Format: Book
Published: Berlin New York Springer 2003
Series:Springer series in advanced microelectronics, 9
Subjects:
Dielectrics
Integrated circuits
Electric insulators and insulation
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xix, 309 p. ill. 24 cm
Bibliography:Includes bibliographical references and index
ISBN:3540678190 (alk. paper)
ISSN:1437-0387 ;

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