MEMS mechanical sensors

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Bibliographic Details
Other Authors:	Beeby, Stephen
Format:	Book
Published:	Boston, MA Artech House 2004
Series:	Artech House microelectromechanical system series
Subjects:	Microelectromechanical systems Detectors
Online Access:	Click Here to View Status and Holdings.
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MARC


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001	wils-315762
020	#	#	\|a 1580535364 (alk. paper)
090	0	0	\|a TK7875 \|b .M4537 2004
245	1	1	\|a MEMS mechanical sensors \|c Stephen Beeby ... [et al.]
260	#	#	\|a Boston, MA \|b Artech House \|c 2004
300	#	#	\|a p. cm
490	1	#	\|a Artech House microelectromechanical system series
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microelectromechanical systems
650	#	0	\|a Detectors
700	1	#	\|a Beeby, Stephen
840	#	#	\|a Microelectromechanical systems series
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=315762
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam