MEMS mechanical sensors
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| Other Authors: | |
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| Format: | Book |
| Published: |
Boston, MA
Artech House
2004
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| Series: | Artech House microelectromechanical system series
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | p. cm |
|---|---|
| Bibliography: | Includes bibliographical references and index |
| ISBN: | 1580535364 (alk. paper) |
MEMS applications