Nano- and microelectromechanical systems fundamentals of nano- and microengineering
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| Main Author: | |
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| Format: | Book |
| Published: |
Boca Raton
CRC Press
2001
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| Series: | Nano- and microscience, engineering, technology, and medicine series
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Nano-and microelectromechanical systems fundamentals of nano-and microengineering