Nano- and microelectromechanical systems fundamentals of nano- and microengineering
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| Main Author: | |
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| Format: | Book |
| Published: |
Boca Raton
CRC Press
2001
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| Series: | Nano- and microscience, engineering, technology, and medicine series
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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| LEADER | 00000n a2200000 a 4501 | ||
|---|---|---|---|
| 001 | wils-315745 | ||
| 020 | # | # | |a 0849309166 |
| 040 | # | # | |a DLC |d ITMB |
| 090 | 0 | 0 | |a TK7875 |b .L96 2000 |
| 100 | 1 | # | |a Lyshevski, Sergey Edward |
| 245 | 1 | 0 | |a Nano- and microelectromechanical systems |b fundamentals of nano- and microengineering |c Sergey Edward Lyshevski |
| 260 | # | # | |a Boca Raton |b CRC Press |c 2001 |
| 300 | # | # | |a 338 p. |b ill. |c 25 cm |
| 490 | 1 | # | |a Nano- and microscience, engineering, technology, and medicine series |
| 504 | # | # | |a Includes bibliographical references and index |
| 650 | # | 0 | |a Microelectromechanical systems |
| 856 | 4 | 0 | |z Click Here to View Status and Holdings. |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=315745 |
| 964 | # | # | |c BOK |d 01 |
Nano-and microelectromechanical systems fundamentals of nano-and microengineering