Introduction to microfabrication

Introduction to microfabrication

Saved in:

Bibliographic Details
Main Author:	Franssila, Sami
Format:	Book
Published:	Chichester, West Sussex, England Hoboken, NJ J. Wiley 2004
Subjects:	Microelectromechanical systems Electronic apparatus and appliances Microfabrication
Online Access:	Click Here to View Status and Holdings.
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

MEMS design and fabrication
Published: (2006)

Introductory MEMS fabrication and applications
by: Adams, Thomas M.
Published: (2010)

Fundamentals of MICROFABRICATION AND NANOTECHNOLOGY VOLUME III From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications
by: Madou, Marc J.
Published: (2012)

Introduction to microelectromechanical systems engineering
by: Maluf, Nadim
Published: (2004)

Microengineering, MEMS, and interfacing a practical guide
by: Banks, Danny
Published: (2006)

Foundations of MEMS
by: Liu, Chang
Published: (2006)

Principles of microelectromechanical systems
by: Lee, Ki Bang
Published: (2011)

Foundations of MEMS
by: Liu, Chang Ph.D
Published: (2012)

Nano-and microelectromechanical systems fundamentals of nano-and microengineering
by: Lyshevski, Sergey Edward
Published: (2001)

A guide to hands-on MEMS design and prototyping
by: Kubby, Joel A.
Published: (2011)

MEMS and NEMS systems, devices, and structures
by: Lyshevski, Sergey Edward
Published: (2002)

Micro electro mechanical systems (MEMS) technology, fabrication processes, and applications
Published: (2010)

Comprehensive microsystems
Published: (2008)

Foundations of MEMS
by: Liu, Chang
Published: (2005)

Nano- and microelectromechanical systems fundamentals of nano- and microengineering
by: Lyshevski, Sergey Edward
Published: (2001)

Advances in multiphysics simulation and experimental testing of MEMS
Published: (2008)

MEMS mechanical sensors
Published: (2004)

Numerical simulation of mechatronic sensors and actuators
by: Kaltenbacher, Manfred 1968-
Published: (2007)

Nano- and micro-electromechanical systems fundamentals of nano- and microengineering
by: Lyshevski, Sergey Edward
Published: (2005)

Photonic MEMS devices design, fabrication and control
by: Liu, Ai-Qun
Published: (2009)

Reliability of MEMS
Published: (2008)

MEMS reliability
by: Hartzell, Allyson L.
Published: (2011)

Modeling Mems and Nems
by: Pelesko, John A.
Published: (2002)

MEMS applications
Published: (2006)

Advanced RF MEMS
by: Lucyszyn, S. Stepan
Published: (2010)

Integrated microsystems electronics, photonics, and biotechnology
Published: (2012)

Smart material systems and MEMS design and development methodologies
by: Varadan, Vijay K. 1943-
Published: (2006)

Biomaterials for MEMS
Published: (2011)

Smart MEMS and sensor systems
by: Gaura, Elena
Published: (2006)

BioNanoFluidic MEMS
Published: (2008)

Scaling issues and design of MEMS
by: Baglio, S. Salvatore
Published: (2007)

MEMS introduction and fundamentals
Published: (2006)

BioMEMS
Published: (2006)

MEMS design and farrication
Published: (2006)

NEMS/MEMS technology and devices
Published: (2011)

NEMS/MEMS technology and devices selected peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, Symposium L, 28 June - 3 July, Singapore
Published: (2009)

Introduction to Microsystem Technology A Guide for Students
by: Gerlach, Gerald, et al.
Published: (2008)

Micro-optomechatronics
Published: (2005)

MEMS technology and devices Suntec, Singapore, 1-6 July 2007
Published: (2007)

Inertial MEMS principles and practice
by: Kempe, Volker
Published: (2011)