Introduction to microfabrication

Introduction to microfabrication

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Bibliographic Details
Main Author:	Franssila, Sami
Format:	Unknown
Published:	Chichester, West Sussex, England Hoboken, NJ J. Wiley 2004
Subjects:	Microelectromechanical systems Electronic apparatus and appliances Microfabrication
Online Access:	Click Here to View Status and Holdings.
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