Introduction to microfabrication

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Bibliographic Details
Main Author:	Franssila, Sami
Format:	Unknown
Published:	Chichester, West Sussex, England Hoboken, NJ J. Wiley 2004
Subjects:	Microelectromechanical systems Electronic apparatus and appliances Microfabrication
Online Access:	Click Here to View Status and Holdings.
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020	#	#	\|a 0470851058 (cloth)
020	#	#	\|a 0470851066 (pbk.)
090	0	0	\|a TK7875 \|b .F73 2004
100	1	#	\|a Franssila, Sami
245	1	1	\|a Introduction to microfabrication \|c Sami Franssila
260	#	#	\|a Chichester, West Sussex, England \|a Hoboken, NJ \|b J. Wiley \|c 2004
300	#	#	\|a xvii, 401 p. \|b ill. \|c 26 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microelectromechanical systems
650	#	0	\|a Electronic apparatus and appliances
650	#	0	\|a Microfabrication
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=312588
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
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