Introduction to microfabrication

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Bibliographic Details
Main Author: Franssila, Sami
Format: Book
Published: Chichester, West Sussex, England Hoboken, NJ J. Wiley 2004
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Online Access:Click Here to View Status and Holdings.
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LEADER 00000n a2200000 a 4501
001 wils-312588
020 # # |a 0470851058 (cloth) 
020 # # |a 0470851066 (pbk.) 
090 0 0 |a TK7875  |b .F73 2004 
100 1 # |a Franssila, Sami 
245 1 1 |a Introduction to microfabrication  |c Sami Franssila 
260 # # |a Chichester, West Sussex, England  |a Hoboken, NJ  |b J. Wiley  |c 2004 
300 # # |a xvii, 401 p.  |b ill.  |c 26 cm 
504 # # |a Includes bibliographical references and index 
650 # 0 |a Microelectromechanical systems 
650 # 0 |a Electronic apparatus and appliances 
650 # 0 |a Microfabrication 
856 4 0 |z Click Here to View Status and Holdings.  |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=312588 
964 # # |c BOK  |d 01 
040 # # |a Shah Alam