Introduction to microfabrication
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Format: | Book |
Published: |
Chichester, West Sussex, England Hoboken, NJ
J. Wiley
2004
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Subjects: | |
Online Access: | Click Here to View Status and Holdings. |
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LEADER | 00000n a2200000 a 4501 | ||
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001 | wils-312588 | ||
020 | # | # | |a 0470851058 (cloth) |
020 | # | # | |a 0470851066 (pbk.) |
090 | 0 | 0 | |a TK7875 |b .F73 2004 |
100 | 1 | # | |a Franssila, Sami |
245 | 1 | 1 | |a Introduction to microfabrication |c Sami Franssila |
260 | # | # | |a Chichester, West Sussex, England |a Hoboken, NJ |b J. Wiley |c 2004 |
300 | # | # | |a xvii, 401 p. |b ill. |c 26 cm |
504 | # | # | |a Includes bibliographical references and index |
650 | # | 0 | |a Microelectromechanical systems |
650 | # | 0 | |a Electronic apparatus and appliances |
650 | # | 0 | |a Microfabrication |
856 | 4 | 0 | |z Click Here to View Status and Holdings. |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=312588 |
964 | # | # | |c BOK |d 01 |
040 | # | # | |a Shah Alam |