Introduction to microfabrication
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Main Author: | |
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Format: | Book |
Published: |
Chichester, West Sussex, England Hoboken, NJ
J. Wiley
2004
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Subjects: | |
Online Access: | Click Here to View Status and Holdings. |
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Physical Description: | xvii, 401 p. ill. 26 cm |
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Bibliography: | Includes bibliographical references and index |
ISBN: | 0470851058 (cloth) 0470851066 (pbk.) |