Introduction to microfabrication

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Bibliographic Details
Main Author: Franssila, Sami
Format: Book
Published: Chichester, West Sussex, England Hoboken, NJ J. Wiley 2004
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Description
Physical Description:xvii, 401 p. ill. 26 cm
Bibliography:Includes bibliographical references and index
ISBN:0470851058 (cloth)
0470851066 (pbk.)