Semiconductor manufacturing technology Michael Quirk, Julian Serda

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Bibliographic Details
Main Author:	Quirk, Michael
Other Authors:	Serda, Julian
Format:	Book
Published:	United State Prentice Hall 2001
Subjects:	Electronic industries Semiconductors > Design and construction
Online Access:	Click Here to View Status and Holdings.
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MARC


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100	1	#	\|a Quirk, Michael
245	1	1	\|a Semiconductor manufacturing technology \|b Michael Quirk, Julian Serda
260	#	#	\|a United State \|b Prentice Hall \|c 2001
300	#	#	\|a xiii, 666 p. \|b ill. \|c 29 cm
504	#	#	\|a Includes bibliographical references (p. 647) and index
650	#	0	\|a Electronic industries
650	#	0	\|a Semiconductors \|x Design and construction
700	1	#	\|a Serda, Julian
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=311556
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