Semiconductor manufacturing technology Michael Quirk, Julian Serda
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| Format: | Book |
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United State
Prentice Hall
2001
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| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xiii, 666 p. ill. 29 cm |
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| Bibliography: | Includes bibliographical references (p. 647) and index |
| ISBN: | 0131229370 0130815209 |
IEEE transactions on semiconductor manufacturing 
Manufacturing technology in the electronics industry an introduction