Modeling Mems and Nems
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| Format: | Book |
| Published: |
New York
A ARC Press
2002
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| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xxiii, 357 p. ill. 25 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 1584883065 |
MEMS and NEMS systems, devices, and structures