Fundamentals of Microfabrication ,the science of miniaturization

Fundamentals of Microfabrication ,the science of miniaturization

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Bibliographic Details
Main Author:	Madou, Marc J.
Format:	Unknown
Published:	New York CRC Press 2001
Subjects:	Microelectromechanical systems > Design and construction Integrated circuits > Design and construction Microelectronics
Online Access:	Click Here to View Status and Holdings.
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