Fundamentals of Microfabrication ,the science of miniaturization

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Bibliographic Details
Main Author:	Madou, Marc J.
Format:	Book
Published:	New York CRC Press 2001
Subjects:	Microelectromechanical systems > Design and construction Integrated circuits > Design and construction Microelectronics
Online Access:	Click Here to View Status and Holdings.
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MARC


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020	#	#	\|a 0849308267
090	0	0	\|a TK7836 \|b .M33 2002
100	1	#	\|a Madou, Marc J.
245	1	1	\|a Fundamentals of Microfabrication ,the science of miniaturization \|c Marc J.Madou
260	#	#	\|a New York \|b CRC Press \|c 2001
300	#	#	\|a 723 p. \|b col. ill. \|c 29 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microelectromechanical systems \|x Design and construction
650	#	0	\|a Integrated circuits \|x Design and construction
650	#	0	\|a Microelectronics
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=305362
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
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