Fundamentals of Microfabrication ,the science of miniaturization
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| Main Author: | |
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| Format: | Book |
| Published: |
New York
CRC Press
2001
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | 723 p. col. ill. 29 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0849308267 |
Microfabrication and nanomanufacturing