Fabrication of Silicon Microprobes for Optical Near-Field Applications

Fabrication of Silicon Microprobes for Optical Near-Field Applications

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Bibliographic Details
Main Author:	Minh, Phan Ngoc
Other Authors:	Takahito, Ono, Masayoshi, Esashi
Format:	Unknown
Published:	New York CRC Press 2002
Subjects:	Silicon Near-field microscopy Micromachining
Online Access:	Click Here to View Status and Holdings.
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