Fabrication of Silicon Microprobes for Optical Near-Field Applications

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Bibliographic Details
Main Author:	Minh, Phan Ngoc
Other Authors:	Takahito, Ono, Masayoshi, Esashi
Format:	Book
Published:	New York CRC Press 2002
Subjects:	Silicon Near-field microscopy Micromachining
Online Access:	Click Here to View Status and Holdings.
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LEADER	00000n a2200000 a 4501
001	wils-305361
020	#	#	\|a 0849311543
090	0	0	\|a TJ1191.5 \|b .M5526 2002
100	1	#	\|a Minh, Phan Ngoc
245	1	1	\|a Fabrication of Silicon Microprobes for Optical Near-Field Applications \|c Phan Ngoc Minh,Ono Takahito & Esashi Masayoshi
260	#	#	\|a New York \|b CRC Press \|c 2002
300	#	#	\|a 180 p. \|b ill. \|c 25 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Silicon
650	#	0	\|a Near-field microscopy
650	#	0	\|a Micromachining
700	1	#	\|a Takahito, Ono
700	#	#	\|a Masayoshi, Esashi
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=305361
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
998	#	#	\|a 00260##a002.8.2\|\|00260##b002.8.4\|\|00260##c002.7.6\|\|00300##a003.4.1\|\|00300##b003.6.1\|\|00300##c003.5.1\|\|01700##a0011.2.2\|\|