Handbook of chemicals and gases for the semiconductor industry

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Bibliographic Details
Main Author:	Mi?sra, ?A?sutosha 1970-
Other Authors:	Hogan, Jeremiah D, Chorush, Russell
Format:	Book
Published:	New York Wiley-VCH 2002
Subjects:	Chemicals > Handbooks, manuals, etc Semiconductors > Handbooks, manuals, etc > Materials
Online Access:	Click Here to View Status and Holdings.
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