Handbook of chemicals and gases for the semiconductor industry

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Bibliographic Details
Main Author:	Mi?sra, ?A?sutosha 1970-
Other Authors:	Hogan, Jeremiah D, Chorush, Russell
Format:	Unknown
Published:	New York Wiley-VCH 2002
Subjects:	Chemicals > Handbooks, manuals, etc Semiconductors > Handbooks, manuals, etc > Materials
Online Access:	Click Here to View Status and Holdings.
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LEADER	00000n a2200000 a 4501
001	wils-294394
020	#	#	\|a 0471316717
090	0	0	\|a TP201 \|b .M57 2002
100	1	#	\|a Mi?sra, ?A?sutosha \|c 1970-
245	1	1	\|a Handbook of chemicals and gases for the semiconductor industry \|c Ashutosh Misra, Jeremiah D. Hogan, Russell Chorush
260	#	#	\|a New York \|b Wiley-VCH \|c 2002
300	#	#	\|a xiii, 363 p. \|b ill. \|c 25 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Chemicals \|v Handbooks, manuals, etc
650	#	0	\|a Semiconductors \|v Handbooks, manuals, etc \|x Materials
700	1	#	\|a Hogan, Jeremiah D
700	#	#	\|a Chorush, Russell
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=294394
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
998	#	#	\|a 00260##a002.8.2\|\|00260##b002.8.4\|\|00260##c002.7.6\|\|00300##a003.4.1\|\|00300##b003.6.1\|\|00300##c003.5.1\|\|01700##a0011.2.2\|\|