Handbook of chemicals and gases for the semiconductor industry

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Bibliographic Details
Main Author: Mi?sra, ?A?sutosha 1970-
Other Authors: Hogan, Jeremiah D, Chorush, Russell
Format: Book
Published: New York Wiley-VCH 2002
Subjects:
Online Access:Click Here to View Status and Holdings.
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LEADER 00000n a2200000 a 4501
001 wils-294394
020 # # |a 0471316717 
090 0 0 |a TP201  |b .M57 2002 
100 1 # |a Mi?sra, ?A?sutosha  |c 1970- 
245 1 1 |a Handbook of chemicals and gases for the semiconductor industry  |c Ashutosh Misra, Jeremiah D. Hogan, Russell Chorush 
260 # # |a New York  |b Wiley-VCH  |c 2002 
300 # # |a xiii, 363 p.  |b ill.  |c 25 cm 
504 # # |a Includes bibliographical references and index 
650 # 0 |a Chemicals  |v Handbooks, manuals, etc 
650 # 0 |a Semiconductors  |v Handbooks, manuals, etc  |x Materials 
700 1 # |a Hogan, Jeremiah D 
700 # # |a Chorush, Russell 
856 4 0 |z Click Here to View Status and Holdings.  |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=294394 
964 # # |c BOK  |d 01 
040 # # |a Shah Alam