Handbook of chemicals and gases for the semiconductor industry

Handbook of chemicals and gases for the semiconductor industry

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Bibliographic Details
Main Author: Mi?sra, ?A?sutosha 1970-
Other Authors: Hogan, Jeremiah D, Chorush, Russell
Format: Book
Published: New York Wiley-VCH 2002
Subjects:
Chemicals > Handbooks, manuals, etc
Semiconductors > Handbooks, manuals, etc > Materials
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xiii, 363 p. ill. 25 cm
Bibliography:Includes bibliographical references and index
ISBN:0471316717

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