The science and engineering of microelectronic fabrication

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Bibliographic Details
Main Author:	Campbell, Stephen A. 1954-
Format:	Book
Published:	New York Oxford University 2001
Edition:	2nd ed
Series:	The Oxford series in electrical and computer engineering
Subjects:	Semiconductors > Design and construction
Online Access:	Click Here to View Status and Holdings.
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100	1	#	\|a Campbell, Stephen A. \|c 1954-
245	1	1	\|a The science and engineering of microelectronic fabrication \|c Stephen A. Campbell
250	#	#	\|a 2nd ed
260	#	#	\|a New York \|b Oxford University \|c 2001
300	#	#	\|a xiv, 603 p. \|b ill. \|c 24 cm
490	1	#	\|a The Oxford series in electrical and computer engineering
650	#	0	\|a Semiconductors \|x Design and construction
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=288732
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