The science and engineering of microelectronic fabrication

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Bibliographic Details
Main Author: Campbell, Stephen A. 1954-
Format: Book
Published: New York Oxford University 2001
Edition:2nd ed
Series:The Oxford series in electrical and computer engineering
Subjects:
Online Access:Click Here to View Status and Holdings.
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LEADER 00000n a2200000 a 4501
001 wils-288732
020 # # |a 0195136055 
090 0 0 |a TK7871.85  |b .C25 2001 
100 1 # |a Campbell, Stephen A.  |c 1954- 
245 1 1 |a The science and engineering of microelectronic fabrication  |c Stephen A. Campbell 
250 # # |a 2nd ed 
260 # # |a New York  |b Oxford University  |c 2001 
300 # # |a xiv, 603 p.  |b ill.  |c 24 cm 
490 1 # |a The Oxford series in electrical and computer engineering 
650 # 0 |a Semiconductors  |x Design and construction 
856 4 0 |z Click Here to View Status and Holdings.  |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=288732 
964 # # |c BOK  |d 01 
040 # # |a Shah Alam 
998 # # |a 00250##a002.5.2||00260##a002.8.2||00260##b002.8.4||00260##c002.7.6||00300##a003.4.1||00300##b003.6.1||00300##c003.5.1||