The science and engineering of microelectronic fabrication

Saved in:

Bibliographic Details
Main Author:	Campbell, Stephen A. 1954-
Format:	Unknown
Published:	New York Oxford University 2001
Edition:	2nd ed
Series:	The Oxford series in electrical and computer engineering
Subjects:	Semiconductors > Design and construction
Online Access:	Click Here to View Status and Holdings.
Tags:	Add Tag No Tags, Be the first to tag this record!

MARC


LEADER	00000n a2200000 a 4501
001	wils-288732
020	#	#	\|a 0195136055
090	0	0	\|a TK7871.85 \|b .C25 2001
100	1	#	\|a Campbell, Stephen A. \|c 1954-
245	1	1	\|a The science and engineering of microelectronic fabrication \|c Stephen A. Campbell
250	#	#	\|a 2nd ed
260	#	#	\|a New York \|b Oxford University \|c 2001
300	#	#	\|a xiv, 603 p. \|b ill. \|c 24 cm
490	1	#	\|a The Oxford series in electrical and computer engineering
650	#	0	\|a Semiconductors \|x Design and construction
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=288732
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
998	#	#	\|a 00250##a002.5.2\|\|00260##a002.8.2\|\|00260##b002.8.4\|\|00260##c002.7.6\|\|00300##a003.4.1\|\|00300##b003.6.1\|\|00300##c003.5.1\|\|