Introduction to microelectronic fabrication
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Main Author: | |
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Format: | Unknown |
Published: |
New Jersey
Prentice Hall
2002
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Edition: | 2nd ed |
Series: | Modular series on solid state devices v. 5
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Subjects: | |
Online Access: | Click Here to View Status and Holdings. |
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Item Description: | Includes index |
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Physical Description: | xiv, 316 p. ill. 26 cm |
ISBN: | 0201444947 |