Semiconductor Devices Physics and Technology

This eagerly-anticipated revision offers more than 50% new or revised material that reflects the multitude of important recent discoveries and advances in device physics and integrated circuit processing. The book offers a thorough introduction to physical principles of modern semiconductor devices...

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Bibliographic Details
Main Author: Sze, S.M. 1936- (Author)
Format: Book
Language:English
Published: New York John Wiley & Sons 2002
Edition:2ND EDITION
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Summary:This eagerly-anticipated revision offers more than 50% new or revised material that reflects the multitude of important recent discoveries and advances in device physics and integrated circuit processing. The book offers a thorough introduction to physical principles of modern semiconductor devices and their fabrication technology. Readers are presented with theoretical and practical aspects of every step in device characterizations and fabrication, with an emphasis on integrated circuits
Physical Description:viii, 563 pages illustrations 26 cm
Bibliography:Includes bibliographical references and index
ISBN:9780471333722
0471333727