Introduction to VLSI process engineering

Saved in:

Bibliographic Details
Other Authors:	Naka, Yuji
Format:	Book
Published:	London Chapman & Hall 1993
Subjects:	Manufacturing processes
Online Access:	Click Here to View Status and Holdings.
Tags:	Add Tag No Tags, Be the first to tag this record!

MARC


LEADER	00000n a2200000 a 4501
001	wils-233808
020	#	#	\|a 0412395509
090	0	0	\|a TK7874 \|b I57
245	1	1	\|a Introduction to VLSI process engineering \|c edited by the society of Chemical Engineers of Japan \|f translated by Naka Yuji
260	#	#	\|a London \|b Chapman & Hall \|c 1993
300	#	#	\|a xiii, 210p. \|c 23cm
500	#	#	\|a Includes index
650	#	0	\|a Manufacturing processes
700	1	#	\|a Naka, Yuji
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=233808
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
998	#	#	\|a 00260##a002.17.2\|\|00260##b002.17.2\|\|00260##c002.17.2\|\|00300##a002.17.2\|\|00300##c002.17.2\|\|00500##a002.17.2\|\|