Semiconductor integrated circuit processing technology

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Bibliographic Details
Main Author: Runyan, W. R
Other Authors: Bean, Kenneth E
Format: Book
Published: Reading, Mass. Addison-Wesley 1990
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Online Access:Click Here to View Status and Holdings.
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001 wils-225443
020 # # |a 0201108313 
090 0 0 |a TF7874  |b .R86 1990 
100 1 # |a Runyan, W. R 
245 1 0 |a Semiconductor integrated circuit processing technology  |c W. R. Runyan, K. E. Bean 
260 # # |a Reading, Mass.  |b Addison-Wesley  |c 1990 
300 # # |a xiii, 638p.  |b ill.  |c 25cm 
650 # 0 |a Semiconductors 
650 # 0 |a Integrated circuits  |x Design and construction 
700 1 # |a Bean, Kenneth E 
856 4 0 |z Click Here to View Status and Holdings.  |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=225443 
964 # # |c BOK  |d 01 
040 # # |a Shah Alam