Particle control for semiconductor manufacturing

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Bibliographic Details
Other Authors:	Donovan, R. P
Format:	Book
Published:	New York M. Dekker 1990
Subjects:	Semiconductors > Defects Particles Semiconductors
Online Access:	Click Here to View Status and Holdings.
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MARC


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020	#	#	\|a 0824782429
090	0	0	\|a TK7871.85 \|b P37
245	1	1	\|a Particle control for semiconductor manufacturing \|c [edited by] R.P. Donovan
260	#	#	\|a New York \|b M. Dekker \|c 1990
300	#	#	\|a xiii, 464 p. \|b ill. \|c 26 cm
500	#	#	\|a Updated revision of the course notes distributed at a short course held on Apr. 19-21, 1988, in Research Triangle Park, N.C# \|a Includes bibliographical references
650	#	0	\|a Semiconductors \|x Defects
650	#	0	\|a Particles
650	#	0	\|a Semiconductors
700	1	#	\|a Donovan, R. P
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=222078
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