Particle control for semiconductor manufacturing
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| Format: | Book |
| Published: |
New York
M. Dekker
1990
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| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Item Description: | Updated revision of the course notes distributed at a short course held on Apr. 19-21, 1988, in Research Triangle Park, N.C# Includes bibliographical references |
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| Physical Description: | xiii, 464 p. ill. 26 cm |
| ISBN: | 0824782429 |
Extended defects in semiconductors electronic properties, device effects and structures