Handbook of semiconductor manufacturing technology

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Bibliographic Details
Other Authors:	Nishi, Yoshio, Doering, Robert
Format:	Book
Published:	New York Marcel Dekker 2000
Subjects:	Semiconductors > Design and construction > Handbooks, manuals, etc. Semiconductor industry > Handbooks, manuals, etc
Online Access:	Click Here to View Status and Holdings.
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020	#	#	\|a 0824787838
090	0	0	\|a TK7871.85 \|b .H3335 2000
245	1	1	\|a Handbook of semiconductor manufacturing technology \|c edited by Yoshio Nishi, Robert Doering
260	#	#	\|a New York \|b Marcel Dekker \|c 2000
300	#	#	\|a xiv, 1157 p. \|b ill. \|c 29 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Semiconductors \|x Design and construction \|x Handbooks, manuals, etc.
650	#	0	\|a Semiconductor industry \|x Handbooks, manuals, etc
700	1	#	\|a Nishi, Yoshio
700	#	#	\|a Doering, Robert
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=218874
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
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