Microsystem technology and microbotics

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Bibliographic Details
Main Author:	Fatikow, S. 1960-
Other Authors:	Rembold, U.
Format:	Unknown
Published:	Berlin Springer-Verlag 1997
Subjects:	Electromechanical devices > Design and construction Microfabrication Robotics
Online Access:	Click Here to View Status and Holdings.
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020	#	#	\|a 3540606580
090	0	0	\|a TJ163 \|b .F38 1997
100	1	#	\|a Fatikow, S. \|c 1960-
245	1	1	\|a Microsystem technology and microbotics \|c S. Fatikow, U.Rembold
260	#	#	\|a Berlin \|b Springer-Verlag \|c 1997
300	#	#	\|a xii, 402 p. \|b ill. \|c 24 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Electromechanical devices \|x Design and construction
650	#	0	\|a Microfabrication
650	#	0	\|a Robotics
700	1	#	\|a Rembold, U.
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=208634
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
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