Microsystem technology and microbotics

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Bibliographic Details
Main Author: Fatikow, S. 1960-
Other Authors: Rembold, U.
Format: Book
Published: Berlin Springer-Verlag 1997
Subjects:
Online Access:Click Here to View Status and Holdings.
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020 # # |a 3540606580 
090 0 0 |a TJ163  |b .F38 1997 
100 1 # |a Fatikow, S.  |c 1960- 
245 1 1 |a Microsystem technology and microbotics  |c S. Fatikow, U.Rembold 
260 # # |a Berlin  |b Springer-Verlag  |c 1997 
300 # # |a xii, 402 p.  |b ill.  |c 24 cm 
504 # # |a Includes bibliographical references and index 
650 # 0 |a Electromechanical devices  |x Design and construction 
650 # 0 |a Microfabrication 
650 # 0 |a Robotics 
700 1 # |a Rembold, U. 
856 4 0 |z Click Here to View Status and Holdings.  |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=208634 
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