Silicon VLSI Technology Fundamentals, Practice and Modeling

• Main Authors: Plummer, James D (Author), Deal, Michael D. (Author), Griffin, Peter B. (Author)
• Format: Book
• Language: English
• Published: Upper Saddle River, New Jersey Prentice Hall 2000
• Subjects: Silicon; Silicon oxide films; Integrated circuits > Very large scale integration > Design and construction
• Online Access: Click Here to View Status and Holdings.
• Item Description: Includes index
• Physical Description: xiv, 817 pages illustrations 23 cm
• ISBN: 0130850373; 9780130850379

Unique in approach, this book provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies. Modern CMOS Technology. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. Semiconductor Manufacturing--Clean Rooms, Wafer Cleaning and Gettering. Lithography. Thermal Oxidation and the Si/SiO2 Interface. Dopant Diffusion. Ion Implantation. Thin Film Diffusion. Etching. Backend Technology. For anyone interested in Fabrication Processes.