Materials modification by energetic atoms and ions Symposium held April 28-30, 1992, San Francisco, California, USA

Materials modification by energetic atoms and ions Symposium held April 28-30, 1992, San Francisco, California, USA

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Bibliographic Details
Corporate Author:	Materials Research Society
Other Authors:	Grabowski, Kenneth S
Format:	Book
Published:	Pitsburgh, PA Materials Research Society 1992
Subjects:	Plasma etching > Congresses Semiconductors > Etching > Congresses Ion bombardment > Congresses
Online Access:	Click Here to View Status and Holdings.
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