Materials modification by energetic atoms and ions Symposium held April 28-30, 1992, San Francisco, California, USA

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Bibliographic Details
Corporate Author:	Materials Research Society
Other Authors:	Grabowski, Kenneth S
Format:	Unknown
Published:	Pitsburgh, PA Materials Research Society 1992
Subjects:	Plasma etching > Congresses Semiconductors > Etching > Congresses Ion bombardment > Congresses
Online Access:	Click Here to View Status and Holdings.
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LEADER	00000n a2200000 a 4501
001	wils-184526
020	#	#	\|a 1558991638
090	0	0	\|a TK7871.85 \|b .M3687 1992
110	1	#	\|a Materials Research Society \|j San Francisco, Calif \|k 1992
245	1	1	\|a Materials modification by energetic atoms and ions \|b Symposium held April 28-30, 1992, San Francisco, California, USA \|c editors, Kenneth S. Grabowski ... [et al.]
260	#	#	\|a Pitsburgh, PA \|b Materials Research Society \|c 1992
300	#	#	\|a xiii, 405 p. \|b ill. \|c 24 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Plasma etching \|x Congresses
650	#	0	\|a Semiconductors \|x Etching \|x Congresses
650	#	0	\|a Ion bombardment \|x Congresses
700	1	#	\|a Grabowski, Kenneth S
840	#	#	\|a Materials Research Society symposium proceedings \|v v. 268
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=184526
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
998	#	#	\|a 00260##a002.8.2\|\|00260##b002.8.4\|\|00260##c002.7.6\|\|00300##a003.4.1\|\|00300##b003.6.1\|\|00300##c003.5.1\|\|