Materials modification by energetic atoms and ions Symposium held April 28-30, 1992, San Francisco, California, USA

Materials modification by energetic atoms and ions Symposium held April 28-30, 1992, San Francisco, California, USA

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Bibliographic Details
Corporate Author: Materials Research Society
Other Authors: Grabowski, Kenneth S
Format: Book
Published: Pitsburgh, PA Materials Research Society 1992
Subjects:
Plasma etching > Congresses
Semiconductors > Etching > Congresses
Ion bombardment > Congresses
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xiii, 405 p. ill. 24 cm
Bibliography:Includes bibliographical references and index
ISBN:1558991638

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